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LY530ALH
MEMS motion sensor: high performance 300 /s analog yaw-rate gyroscope
Preliminary data
Features

2.7 V to 3.6 V single-supply operation Wide operating temperature range (-40 C to +85 C) High stability overtemperature Analog absolute angular-rate output Two separate outputs (1x and 4x amplified) Integrated low-pass filters Low power consumption Embedded power-down Embedded self-test High shock and vibration survivability ECOPACK(R) RoHS and "Green" compliant (see Section 5)
LGA-16L (5x5x1.5mm)
The LY530ALH has a full scale of 300 /s and is capable of detecting rates with a -3 dB bandwidth up to 140 Hz. The gyroscope is the combination of one actuator and one accelerometer integrated in a single micromachined structure. It includes a sensing element composed by single driving mass, kept in continuos oscillating movement and able to react when an angular rate is applied based on the Coriolis principle. A CMOS IC provides the measured angular rate to the external world through an analog output voltage, allowing high level of integration and production trimming to better match sensing element characteristics. ST's gyroscope family leverages on robust and mature manufacturing process already used for the production of micromachined accelerometers. ST is already in the field with several hundreds million sensors with excellent acceptance from the market in terms of quality, reliability and performance. LY530ALH is provided in plastic land grid array (LGA) package. Several years ago ST pioneered successfully the usage of this package for accelerometers. Today ST has the widest manufacturing capability and strongest expertise in the world for production of sensor in plastic LGA package.
Package LGA-16 (5x5x1.5) LGA-16 (5x5x1.5) Packing Tray Tape and reel
Applications

Pointing devices, remote and game controllers Motion control with user interface GPS navigation systems Industrial and robotics
Description
The LY530ALH is a low-power single-axis micromachined gyroscope capable of measuring angular rate along yaw axis. It provides excellent temperature stability and high resolution over an extended operating temperature range (-40 C to +85 C).
Table 1.
Device summary
Temperature range (C) -40 to +85 -40 to +85
Order code LY530ALH LY530ALHTR
July 2009
Doc ID 15801 Rev 2
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This is preliminary information on a new product now in development or undergoing evaluation. Details are subject to change without notice.
Contents
LY530ALH
Contents
1 Block diagram and pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2
Mechanical and electrical specifications . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 2.2 2.3 Mechanical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 Electrical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 Absolute maximum ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3
Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.1 3.2 3.3 3.4 Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 Zero-rate level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 Self-test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 High pass filter reset (HP) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4
Application hints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.1 4.2 Output response vs. rotation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 Soldering information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5 6
Package information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 Revision history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
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LY530ALH
Block diagram and pin description
1
Block diagram and pin description
Figure 1. Block diagram
DRIVING MASS GAIN 4x Feedback loop 4xOUT Z (amplified)
+ z
+
CHARGE AMPLIFIER SWITCHED CAPACITOR LOW-PASS FILTER DEMODULATOR Optional LP Filter
Not amplified filtered output Z
-
REFERENCE
TRIMMING CIRCUITS
CLOCK
PHASE GENERATOR
1.1
Pin description
Figure 2. Pin connection
Res
+ z
HP PD ST OUTZ
(TOP VIEW) DIRECTION OF THE DETECTABLE ANGULAR RATE
14 13
Res
16 1
GND FILTVDD VCONT Res
4xINZ
9 8
4xOUTZ Vref
Vdd
5 6
Res
Res
(BOTTOM VIEW)
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Block diagram and pin description
LY530ALH
Table 2.
Pin # 1 2 3 4 5 6 7 8 9 10 11 12 13 14,15 16
Pin description
Pin name GND FILTVDD VCONT Res Res Res Vref 4xOUTZ 4xINZ OUTZ ST PD HP Res Vdd 0V supply voltage PLL filter connection pin #2 PLL filter connection pin #1 Leave unconnected Leave unconnected Leave unconnected Reference voltage Z rate signal output voltage (amplified) Input of 4x amplifier Not amplified output Self-test (logic 0: normal mode; logic 1: self-test) Power-down (logic 0: normal mode; logic 1: power-down mode) High pass filter reset (logic 0: normal operation mode; logic1: external high pass filter is reset) Reserved. Connect to Vdd Power supply Analog function
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Mechanical and electrical specifications
2
2.1
Table 3.
Symbol FSA FS SoA So SoDr Voff Vref OffDr NL BW Rn Top
Mechanical and electrical specifications
Mechanical characteristics
Mechanical characteristics @ Vdd = 3 V, T = 25 C unless otherwise noted(1)
Parameter Measurement range Sensitivity(3) Sensitivity change vs temperature Zero-rate level(3) Reference voltage Zero-rate level change Delta from 25C Vs temperature Non linearity Bandwidth
(4)
Test condition 4x OUT (amplified) OUT (not amplified) 4x OUT (amplified) OUT (not amplified) Delta from 25C
Min.
Typ.(2) 300 1200 3.33 0.83 0.05 1.23 1.23 0.05 1 140 0.035
Max.
Unit /s /s mV/ /s mV/ /s %/C V V /s/C % FS Hz /s / Hz
Best fit straight line
Rate noise density Operating temperature range -40
+85
C
1. The product is factory calibrated at 3 V. The operational power supply range is specified in Table 4. 2. Typical specifications are not guaranteed 3. Sensitivity and zero-rate level are not ratiometric to supply voltage 4. The product is capable of measuring angular rates extending from DC to the selected BW.
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Mechanical and electrical specifications
LY530ALH
2.2
Table 4.
Symbol Vdd Idd IddPdn
Electrical characteristics
Electrical characteristics @ Vdd =3 V, T=25 C unless otherwise noted(1)
Parameter Supply voltage Supply current Supply current in power-down mode Self-test input Logic 1 level Logic 0 level 0.8*Vdd 0 0.8*Vdd -40 Vdd 0.2*Vdd V Logic 1 level Top Operating temperature range Vdd +85 C PD pin connected to GND PD pin connected to Vdd Logic 0 level VST 0 Test condition Min. 2.7 Typ.(2) 3 5 1 Max. 3.6 5.5 5 0.2*Vdd V Unit V mA A
VPD
Power-down input
1. The product is factory calibrated at 3 V 2. Typical specifications are not guaranteed
2.3
Absolute maximum ratings
Stresses above those listed as "Absolute maximum ratings" may cause permanent damage to the device. This is a stress rating only and functional operation of the device under these conditions is not implied. Exposure to maximum rating conditions for extended periods may affect device reliability. Table 5.
Symbol Vdd Vin A TSTG ESD Supply voltage Input voltage on any control pin (PD, ST) Acceleration Storage temperature range Electrostatic discharge protection
Absolute maximum ratings
Ratings Maximum value -0.3 to 6 -0.3 to Vdd +0.3 3000 g for 0.5 ms 10000 g for 0.1 ms -40 to +125 2 (HBM) C kV Unit V V
This is a mechanical shock sensitive device, improper handling can cause permanent damage to the part This is an ESD sensitive device, improper handling can cause permanent damage to the part
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LY530ALH
Terminology
3
3.1
Terminology
Sensitivity
An angular rate gyroscope is a device that produces a positive-going output voltage for counterclockwise rotation around the sensitive axis considered. Sensitivity describes the gain of the sensor and can be determined by applying a defined angular velocity to it. This value changes very little over temperature and time.
3.2
Zero-rate level
Zero-rate level describes the actual output signal if there is no angular rate present. The zero-rate level of precise MEMS sensors is, to some extent, a result of stress to the sensor and therefore zero-rate level can slightly change after mounting the sensor onto a printed circuit board or after exposing it to extensive mechanical stress. This value changes very little over temperature and time.
3.3
Self-test
Self-test allows testing of the mechanical and electrical part of the sensor, allowing the seismic mass to be moved by means of an electrostatic test-force. The self-test function is off when the ST pin is connected to GND. When the ST pin is tied to Vdd, an actuation force is applied to the sensor, emulating a definite Coriolis force. In this case the sensor output will exhibit a voltage change in its DC level which is also dependent on the supply voltage. When ST is active, the device output level is given by the algebraic sum of the signals produced by the velocity acting on the sensor and by the electrostatic test-force. If the output signals change within the amplitude specified in Table 3, then the mechanical element is working properly and the parameters of the interface chip are within the defined specifications.
3.4
High pass filter reset (HP)
The LY530ALH provides the possibility to reset the optional external high pass filter by applying a high logic value to the HP pad. This procedure ensures faster response, especially during overload conditions. Moreover, this operation is suggested each time the device is powered.
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Application hints
LY530ALH
4
Application hints
Figure 3. LY530ALH electrical connections and external component values + z
10nF 10kOhm
C2
GND 470nF 100 nF 10 F
(TOP VIEW) DIRECTION OF THE DETECTABLE ANGULAR RATE
GND
Vdd
R1
C1
GND
1
16
14 13
HP PD
LY530ALH (Top View) 5 9
C1
ST
Not amplified filtered output Z
R2 R1 Vref C2 GND
6
8
Typical values: R1 = 1MOhm C1 = 4.7 F R2 = 33 kOhm C2 = 2.2nF to 2.2F
Power supply decoupling capacitors (100 nF ceramic or polyester + 10 F aluminum) should be placed as near as possible to the device (common design practice). The LY530ALH allows band limiting of the output rate response through the use of an external low pass filter (suggested) and/or high pass filter (optional) in addition to the embedded low pass filter (ft = 140 Hz). 4xOUTZ is OUTZ amplified outputs line, internally buffered to ensure low output impedance. If external high pass or low pass filtering is not applied it is mandatory to short-circuit pad 9 to pad 10 when amplified outputs are used. When only non-amplified output is used (OUTZ), it is suggested to set pad 9 to fixed reference voltage (Vref). When high pass filter is applied to not amplified output (OUTx), it is recommended to buffer the line before entering ADC for performance optimization. The LY530ALH IC includes a PLL (phase locked loop) circuit to synchronize driving and sensing interfaces. Capacitors and resistors must be added at the FILTVDD and VCONT pins (as shown in Figure 3) to implement a low-pass filter.
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4xOUTZ
Vref
LY530ALH
Application hints
4.1
Output response vs. rotation
Figure 4. Output response vs. rotation + z + z
Steady state position: 4xOUTZ = 1.23V OUTZ = 1.23V
Positive rotations as indicated by arrows increase output value over zero rate level: +300/sec --> 4xOUTZ = 1.23V + SoA*300 = 2.23V +300/sec --> OUTZ = 1.23V + So*300 = 1.48V
4.2
Soldering information
The LGA package is compliant with the ECOPACK(R), RoHS and "Green" standard. It is qualified for soldering heat resistance according to JEDEC J-STD-020C. Leave "pin 1 indicator" unconnected during soldering. Land pattern and soldering recommendations are available at www.st.com.
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Package information
LY530ALH
5
Package information
In order to meet environmental requirements, ST offers these devices in different grades of ECOPACK(R) packages, depending on their level of environmental compliance. ECOPACK(R) specifications, grade definitions and product status are available at: www.st.com. ECOPACK(R) is an ST trademark. Figure 5. LGA-16: mechanical data and package dimensions
A1 A2 A3 C D1 E1 L L1 M M1 M2 N N1 T1 T2 R S h k j
1.46
1.5
1.6 1.33
0.057
0.059
0.063 0.052
0.16
0.2 0.3
0.24
0.006
0.008 0.012
0.009
4.85 4.85
5 5 0.8 3.2 1.6
5.15 5.15
0.191 0.191
0.197 0.197 0.031 0.126 0.062
0.203 0.203
2.15
2.175 1.625 2.175 2.4 0.8
2.20
0.085
0.086 0.064 0.086 0.094 0.031
0.087
LGA-16 (5x5x1.5mm) Land Grid Array Package
0.021 0.063
0.475 1.2
0.5
0.525 1.6
0.019 0.047
0.020
0.1 0.15 0.05 0.1
0.004 0.006 0.002 0.004
7887555A
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Revision history
6
Revision history
Table 6.
Date 04-Jun-2009 06-Jul-2009
Document revision history
Revision 1 2 Initial release Small text changes to improve readability. Updated Table 4. Changes
Doc ID 15801 Rev 2
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LY530ALH
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